S00600 - SEMI S6 - 半導体製造装置の排気換気に関する環境，健康，安全のためのガイドライン StdPbc-1104 Reticle Pod to load port

Reticle Pod to load port association

SEMI E5—SEMI Equipment Communications Standard 2 Message Content (SECS-II)

and post-process equipment for semiconductor processes using energetic materials

1  This Standard establishes the properties and physical dimensions of two port components for 1

Temporary bonding uses a temporary adhesive that can be reversed using a chemical

S00600 - SEMI S6 - 半導体製造装置の排気換気に関する環境，健康，安全のためのガイドライン StdPbc-1104 Reticle Pod to load portNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI SME 8 Referenced SEMI Standards (purchase separately) SEMI F5 Guide for Gaseous Effluent Handling SEMI S2 Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment SEMI S14 Safety Guidelines for Fire Risk